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Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers
JournalArticle (Originalarbeit in einer wissenschaftlichen Zeitschrift)
 
ID 4665531
Author(s) Forrer, L.; Kamber, A.; Knoll, A.; Poggio, M.; Braakman, F. R.
Author(s) at UniBasel Poggio, Martino
Forrer, Luca
Kamber, Aurèle
Braakman, Floris
Year 2023
Title Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers
Journal AIP Advances
Volume 13
Number 3
Pages / Article-Number 035208
Publisher AIP Publishing
ISSN/ISBN 2158-3226
edoc-URL https://edoc.unibas.ch/94481/
Full Text on edoc Available
Digital Object Identifier DOI 10.1063/5.0127665
ISI-Number 000943268800002
Document type (ISI) Article
 
   

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