Fabrication of mirror templates in silica with micron-sized radii of curvature

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Fabrication of mirror templates in silica with micron-sized radii of curvature

JournalArticle (Originalarbeit in einer wissenschaftlichen Zeitschrift)

ID	3703665
Author(s)	Najer, Daniel; Renggli, Martina; Riedel, Daniel; Starosielec, Sebastian; Warburton, Richard J.
Author(s) at UniBasel	Warburton, Richard Najer, Daniel Riedel, Daniel Starosielec, Sebastian
Year	2017
Title	Fabrication of mirror templates in silica with micron-sized radii of curvature
Journal	Applied Physics Letters
Volume	110
Number	1
Pages / Article-Number	011101
Abstract	We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with a radius of curvature ≲5 μm at shallow depth and low surface roughness of 2 Å. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structures within a tunable Fabry-Pérot type microcavity and demonstrate near-coating-limited loss rates (ℱ=25 000) and small focal lengths consistent with their geometrical dimensions.
Publisher	AIP Publishing
ISSN/ISBN	0003-6951 ; 1077-3118
edoc-URL	http://edoc.unibas.ch/52517/
Full Text on edoc	Restricted
Digital Object Identifier DOI	10.1063/1.4973458
ISI-Number	WOS:000392834600001
Document type (ISI)	Article

09/05/2024

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