A Fabry-Perot interferometer for micrometer-sized cantilevers
JournalArticle (Originalarbeit in einer wissenschaftlichen Zeitschrift)
ID 175681
Author(s) Hoogenboom, BW; Frederix, PLTM; Yang, JL; Martin, S; Pellmont, Y; Steinacher, M; Zach, S; Langenbach, E; Heimbeck, HJ
Author(s) at UniBasel Engel, Andreas
Year 2005
Title A Fabry-Perot interferometer for micrometer-sized cantilevers
Journal Applied Physics Letters
Volume 86
Number 7
Pages / Article-Number 074101
Abstract We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8 mm. At 1 MHz, a noise floor of fm/ rootHz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces. (C) 2005 American Institute of Physics.
Publisher American Institute of Physics
ISSN/ISBN 0003-6951
edoc-URL http://edoc.unibas.ch/dok/A5262418
Full Text on edoc No
Digital Object Identifier DOI 10.1063/1.1866229
ISI-Number WOS:000227439400104
Document type (ISI) Article

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