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Spectroscopy of mechanical dissipation in micro-mechanical membranes
JournalArticle (Originalarbeit in einer wissenschaftlichen Zeitschrift)
 
ID 1070245
Author(s) Jöckel, Andreas; Rakher, Matthew T.; Korppi, Maria; Camerer, Stephan; Hunger, David; Mader, Matthias; Treutlein, Philipp
Author(s) at UniBasel Treutlein, Philipp
Jöckel, Andreas
Rakher, Matthew T.
Korppi, Maria
Year 2011
Title Spectroscopy of mechanical dissipation in micro-mechanical membranes
Journal Applied physics letters
Volume 99
Number 14
Pages / Article-Number 143109
Keywords micromechanical devices, oscillators, Q-factor, silicon compounds
Abstract We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned reversibly by up to 40% through local heating with a laser. Several distinct resonances in Q are observed that can be explained by coupling to membrane frame modes. Away from the resonances, the background Q is independent of frequency and temperature in the measured range.
Publisher American Institute of Physics
ISSN/ISBN 0003-6951
edoc-URL http://edoc.unibas.ch/dok/A6002526
Full Text on edoc Available
Digital Object Identifier DOI 10.1063/1.3646914
ISI-Number WOS:000295625100075
Document type (ISI) Article
 
   

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